Indications of bulk property changes from surface ion implantation
نویسندگان
چکیده
منابع مشابه
Surface disorder production during plasma immersion implantation and high energy ion implantation
High-depth-resolution Rutherford Backscattering Spectrometry (RBS) combined with channeling technique was used to analyze the surface layer formed during plasma immersion ion implantation (PIII) of single crystal silicon substrates. Single wavelength multiple angle of incidence ellipsometry (MAIE) was applied to estimate the thickness of the surface layer. The thickness of the disordered layer ...
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ژورنال
عنوان ژورنال: Philosophical Magazine
سال: 2010
ISSN: 1478-6435,1478-6443
DOI: 10.1080/14786435.2010.518986